Modeling and Characterization of cMUT-based Devices Applied to Galvanic Isolation

Autor:	Jacques Heller, Sophie Ngo, Daniel Alquier, Audren Boulme, D. Certon, Marie Perroteau
Rok vydání:	2015
Předmět:	Substrate coupling Computer science Acoustics Physics and Astronomy(all) Finite Element Model law.invention cMUT Transducer Capacitive micromachined ultrasonic transducers Galvanic isolation law Power electronics Ultrasonic sensor Transformer Electronic circuit
Zdroj:	Physics Procedia. 70:987-991
ISSN:	1875-3892
DOI:	10.1016/j.phpro.2015.08.206
Popis:	This paper describes a new way of using cMUT technology: galvanic isolation for power electronics. These devices work like acoustic transformers, except that piezoelectricity is replaced by cMUT technology. Primary and secondary circuits are two cMUT-based transducers respectively layered on each side of a silicon substrate, through which the ultrasonic triggering signal is transmitted. A specific model based on a commercial finite element code was implemented to simulate these devices. A particular attention was paid on the modeling of the cMUT/substrate coupling which is a key feature for the intended application. First experimental results performed for model validation are presented here and discussed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b3d615cfb89792d24efc92e6c38245ef https://doi.org/10.1016/j.phpro.2015.08.206 Zobrazit plný text záznamu