Structural tunability and origin of two-level systems in amorphous silicon
Autor: | H. C. Jacks, M. Molina-Ruiz, M. H. Weber, J. J. Maldonis, P. M. Voyles, M. R. Abernathy, T. H. Metcalf, X. Liu, F. Hellman |
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Jazyk: | angličtina |
Rok vydání: | 2021 |
Předmět: | |
Zdroj: | Physical Review Materials, vol 6, iss 4 |
Popis: | Amorphous silicon films prepared by electron beam evaporation have systematically and substantially greater atomic density for higher thickness, higher growth temperature, and slower deposition rate, reaching the density of crystalline Si when films of thickness greater than ~300 nm are grown at 425 $^{\circ}$C and at Comment: 30 pages, 12 figures |
Databáze: | OpenAIRE |
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