Structural tunability and origin of two-level systems in amorphous silicon

Autor: H. C. Jacks, M. Molina-Ruiz, M. H. Weber, J. J. Maldonis, P. M. Voyles, M. R. Abernathy, T. H. Metcalf, X. Liu, F. Hellman
Jazyk: angličtina
Rok vydání: 2021
Předmět:
Zdroj: Physical Review Materials, vol 6, iss 4
Popis: Amorphous silicon films prepared by electron beam evaporation have systematically and substantially greater atomic density for higher thickness, higher growth temperature, and slower deposition rate, reaching the density of crystalline Si when films of thickness greater than ~300 nm are grown at 425 $^{\circ}$C and at
Comment: 30 pages, 12 figures
Databáze: OpenAIRE