High-Yield Transfer Printing of Metal–Insulator–Metal Nanodiodes
| Autor: | Bernhard Fabel, Ute Zschieschang, Gunther Jegert, M. Bareiß, Daniel Kälblein, Paolo Lugli, Edward M. Nelson, Hagen Klauk, Christian Jirauschek, Giuseppe Scarpa, Frederik Ante, Gregory Timp, Wolfgang Porod |
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| Rok vydání: | 2012 |
| Předmět: |
010302 applied physics
Fabrication Materials science biology business.industry General Engineering Physics::Optics General Physics and Astronomy Nanotechnology 02 engineering and technology Metal-insulator-metal 021001 nanoscience & nanotechnology biology.organism_classification 01 natural sciences Characterization (materials science) Transfer printing 0103 physical sciences Optoelectronics General Materials Science Nanodiodes 0210 nano-technology business Electrical conductor Electronic circuit Diode |
| Zdroj: | ACS Nano. 6:2853-2859 |
| ISSN: | 1936-086X 1936-0851 |
| DOI: | 10.1021/nn3004058 |
| Popis: | Nanoscale metal-insulator-metal (MIM) diodes represent important devices in the fields of electronic circuits, detectors, communication, and energy, as their cutoff frequencies may extend into the "gap" between the electronic microwave range and the optical long-wave infrared regime. In this paper, we present a nanotransfer printing method, which allows the efficient and simultaneous fabrication of large-scale arrays of MIM nanodiode stacks, thus offering the possibility of low-cost mass production. In previous work, we have demonstrated the successful transfer and electrical characterization of macroscopic structures. Here, we demonstrate for the first time the fabrication of several millions of nanoscale diodes with a single transfer-printing step using a temperature-enhanced process. The electrical characterization of individual MIM nanodiodes was performed using a conductive atomic force microscope (AFM) setup. Our analysis shows that the tunneling current is the dominant conduction mechanism, and the electrical measurement data agree well with experimental data on previously fabricated microscale diodes and numerical simulations. |
| Databáze: | OpenAIRE |
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