ANALYSIS OF MANUFACTURING OF VOLTAGE RESTORE TO INCREASE DENSITY OF ELEMENTS OF THE CIRCUIT
| Autor: | E. L. Pankratov, E. A. Bulaeva |
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| Rok vydání: | 2016 |
| Předmět: |
Engineering
business.industry 0208 environmental biotechnology Electrical engineering Mechanical engineering 02 engineering and technology 021001 nanoscience & nanotechnology 020801 environmental engineering Condensed Matter::Materials Science Condensed Matter::Superconductivity Voltage restore increasing of density of elements 0210 nano-technology business optimization of manufacturing Voltage |
| Popis: | We introduce an approach for increasing density of voltage restore elements. The approach based on manufacturing of a heterostructure, which consist of a substrate and an epitaxial layer with special configuration. Several required sections of the layer should be doped by diffusion or ion implantation. After that dopants and/or radiation defects should be annealed. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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