Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer
| Autor: | Paul Muralt, Sylvain Ballandras, Fazel Parsapour, Vladimir Pashchenko, Ken Haffner |
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| Předmět: |
010302 applied physics
Microelectromechanical systems hybrid transducer Materials science thin film SAW FBAR Acoustics Surface acoustic wave Substrate (electronics) BAW simulation 01 natural sciences Piezoelectricity Resonator MEMS COMSOL Transducer 0103 physical sciences piezoelectric resonator Thin film Acoustic impedance 010301 acoustics AlScN |
| Popis: | Acoustic delay lines based on Al 0.85 Sc 0.15 N thin film hybrid transducers were investigated by finite element modeling. It was found that an acoustic impedance matching between transducer and non-piezoelectric substrate material plays a crucial role to efficiently excite a traveling surface acoustic wave (SAW) through the BAW piston motion. Test devices based on the 2.5 um thick Al 0.85 Sc 0.15 N piezoelectric film on the silicon substrate were fabricated and characterized. |
| Databáze: | OpenAIRE |
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