A lithographic approach for quantum dot-photonic crystal nanocavity coupling in dilute nitrides
| Autor: | Marco Felici, Mario Capizzi, Anna Vinattieri, Annamaria Gerardino, Antonio Polimeni, Mark Hopkinson, Luca Businaro, Massimo Gurioli, Francesco Biccari, Francesca Intonti, Silvia Rubini, Giorgio Pettinari |
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| Rok vydání: | 2017 |
| Předmět: |
Materials science
Fabrication Band gap Hydrogen in semiconductors Photonic crystal structures Physics::Optics Nanotechnology 02 engineering and technology 01 natural sciences QD-PhC coupling Coatings and Films Crystal Condensed Matter::Materials Science Dilute nitrides Site-controlled QDs Atomic and Molecular Physics Electronic Optical and Magnetic Materials Atomic and Molecular Physics and Optics Condensed Matter Physics Surfaces Coatings and Films Electrical and Electronic Engineering 0103 physical sciences Electronic Photonic crystal electron beam litography Optical and Magnetic Materials 010306 general physics Lithography Common emitter business.industry Condensed Matter::Mesoscopic Systems and Quantum Hall Effect 021001 nanoscience & nanotechnology Computer Science::Other Surfaces Quantum dot Optoelectronics and Optics 0210 nano-technology business Electron-beam lithography |
| Zdroj: | Microelectronic engineering 174 (2017): 16–19. doi:10.1016/j.mee.2016.12.003 info:cnr-pdr/source/autori:Pettinari G.; Gerardino A.; Businaro L.; Polimeni A.; Capizzi M.; Hopkinson M.; Rubini S.; Biccari F.; Intonti F.; Vinattieri A.; Gurioli M.; Felici M./titolo:A lithographic approach for quantum dot-photonic crystal nanocavity coupling in dilute nitrides/doi:10.1016%2Fj.mee.2016.12.003/rivista:Microelectronic engineering/anno:2017/pagina_da:16/pagina_a:19/intervallo_pagine:16–19/volume:174 |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/j.mee.2016.12.003 |
| Popis: | We report on a novel lithographic approach for the fabrication of integrated quantum dot (QD)-photonic crystal (PhC) nanocavity systems. We exploit unique hydrogen's ability to tailor the band gap energy of dilute nitride semiconductors to fabricate isolated site-controlled QDs via a spatially selective hydrogenation at the nanometer-scale. A deterministic integration of the realized site-controlled QDs with PhC nanocavities is provided by the inherent realignment precision (~20nm) of the electron beam lithography system used for the fabrication of both QDs and PhC cavities. A detailed description of the fabrication steps leading to the realization of integrated QD-PhC cavity systems is provided, together with the experimental evidence of a weak coupling effect between the single-photon emitter and the PhC cavity. Display Omitted A fabrication strategy for quantum dot-photonic crystal integration is presented.Spatial controlled hydrogen diffusion in dilute nitrides is used.Weak coupling effect between single photon emitter and cavity are observed. |
| Databáze: | OpenAIRE |
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