Reliability and degradation mechanism of AlGaAs/InGaAs and InAlAs/InGaAs HEMTs

Autor: Arnulf Leuther, T. Feltgen, F. Benkhelifa, W. Jantz, Michael Dammann
Přispěvatelé: Publica
Rok vydání: 2003
Předmět:
Zdroj: physica status solidi (a). 195:81-86
ISSN: 1521-396X
0031-8965
DOI: 10.1002/pssa.200306303
Popis: The long-term stability of AlGaAs/GaAs and InAlAs/InGaAs high electron mobility transistors (HEMTs), tested under high drain voltage and/or high temperature operation is reported. HEMTs with high In content in the active channel, alternatively fabricated an InP substrates and on GaAs substrates covered by a metamorphic buffer (MHEMT), are compared. Despite the high dislocation density in the buffer layer MHEMTs and InP based HEMTs exhibit comparable reliability. AlGaAs/GaAs HEMTs are more reliable than their InAlAs/InGaAs counterparts, especially when operated at high drain voltage. Failure mechanisms are thermally activated gate sinking, Ohmic contact degradation and hot electron induced degradation.
Databáze: OpenAIRE