Characterization of materials for the design of wireless SAW sensors in a high temperature environment
| Autor: | Baron Thomas, Lesage Jean-Marc, Arapan Lilia, Dulmet Bernard, Wong Guillaume |
|---|---|
| Přispěvatelé: | Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Délégation générale de l'armement (DGA), Ministère de la Défense |
| Jazyk: | angličtina |
| Rok vydání: | 2016 |
| Předmět: |
Microelectromechanical systems
[SPI.OTHER]Engineering Sciences [physics]/Other Materials science Silicon business.industry Surface acoustic wave chemistry.chemical_element Substrate (electronics) 01 natural sciences Characterization (materials science) chemistry 0103 physical sciences Electrode Electronic engineering Optoelectronics Wireless business 010301 acoustics |
| Zdroj: | International Frequency Control Symposium International Frequency Control Symposium, May 2016, New Orleans, United States |
| Popis: | International audience; In this work, we describe an experiment performed to analyze the behavior of materials deposited on an oxidized silicon substrate submitted to high temperature conditions (650°C to 1000°C). This process developed in FEMTO-ST institute aims to characterize materials of potential interest for wireless SAW (Surface Acoustic Wave) sensors in a “high temperature” environment. The analysis indicates that three kinds of sublayer/electrode pairs (W/Mo, Ta/W and Ta/Mo) are good candidates for further developments in actual sensing devices. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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