Optical emission studies of diamond growth species in the shower microplasmas generated by using diamond cathodes

Autor:	I-Nan Lin, Chulung Chen, Keh-Chyang Leou, Shiu-Cheng Lou, Srinivasu Kunuku
Rok vydání:	2014
Předmět:	Materials science business.industry Analytical chemistry Diamond engineering.material Cathode law.invention Carbon film law engineering Optoelectronics Optical emission spectroscopy business Plasma processing
Zdroj:	Web of Science
DOI:	10.1109/ivnc.2014.6894754
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::aefa660423f6b7c1de6017f241f90f3b https://doi.org/10.1109/ivnc.2014.6894754 Zobrazit plný text záznamu