Fused silica GRISMs manufactured by hydrophilic direct bonding at moderate heating
| Autor: | Gerd Harnisch, G. Kalkowski, U. D. Zeitner, Kevin Grabowski, S. Risse, T. Flügel-Paul |
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| Přispěvatelé: | Publica |
| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Materials science business.industry Aerospace Engineering Fused silica Binary grating 02 engineering and technology Substrate (electronics) Direct bonding Grating 021001 nanoscience & nanotechnology 01 natural sciences Grism Optics Space and Planetary Science 0103 physical sciences Dispersion (optics) GRISM manufacturing Optoelectronics Prism Dry etching 0210 nano-technology business Lithography |
| Zdroj: | CEAS Space Journal. 9:433-440 |
| ISSN: | 1868-2510 1868-2502 |
| DOI: | 10.1007/s12567-017-0158-4 |
| Popis: | For high-resolution spectroscopy in space, GRISM elements-obtained by patterning gratings onto a prism surface-find increasing applications. We report on GRISM manufacturing by joining the individual functional elements-prisms and gratings-to suitable components by the technology of hydrophilic direct bonding. Fused silica was used as a substrate material and binary gratings were fabricated by standard e-beam lithography and dry etching. Alignment of the grating dispersion direction to the prism angle was realized by passive adjustment on dedicated bonding gear matched to the substrate geometry. Materials adapted bonds of high transmission, stiffness, and strength were obtained after heat treatment at temperatures of about 200 °C in vacuum. Examples for bonding uncoated as well as coated grating surfaces are given. The results illustrate the great potential of hydrophilic glass direct bonding for manufacturing transmission optics to be used in space or other heavy duty applications. |
| Databáze: | OpenAIRE |
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