Microfabricated Membranes for Radiative Near Field Measurements
| Autor: | Ivan Latella, A. Juneau-Fecteau, Luc G. Fréchette, Julien Sylvestre, Olivier Marconot |
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| Přispěvatelé: | Laboratoire Nanotechnologies Nanosystèmes (LN2 ), Université Grenoble Alpes [2016-2019] (UGA [2016-2019])-École Centrale de Lyon (ECL), Université de Lyon-Université de Lyon-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-Université de Sherbrooke (UdeS)-École supérieure de Chimie Physique Electronique de Lyon (CPE)-Centre National de la Recherche Scientifique (CNRS), Institut Interdisciplinaire d'Innovation Technologique [Sherbrooke] (3IT), Université de Sherbrooke (UdeS) |
| Rok vydání: | 2019 |
| Předmět: |
Amorphous silicon
Materials science business.industry 010401 analytical chemistry Near and far field Substrate (electronics) 01 natural sciences 0104 chemical sciences [SPI]Engineering Sciences [physics] chemistry.chemical_compound Membrane chemistry 0103 physical sciences Heat transfer Radiative transfer Optoelectronics 010306 general physics business Layer (electronics) ComputingMilieux_MISCELLANEOUS Microfabrication |
| Zdroj: | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Jun 2019, Berlin, France. pp.2021-2024, ⟨10.1109/TRANSDUCERS.2019.8808175⟩ |
| DOI: | 10.1109/transducers.2019.8808175 |
| Popis: | We present in this paper measurements of near-field heat transfer across sub-micron gaps between suspended membranes and their substrate. A microfabrication process using amorphous silicon as a sacrificial layer is developed to create membranes (50 µm × 50 µm) with nanoscale separation distance (down to 250 nm). In this configuration, evanescent near-field radiation couples between the membrane and the substrate, which is expected to enhance the heat transfer. Experimental measurements using an embedded heater and thermistor on the membrane demonstrate the enhancement of heat transfer at the smaller gaps, reaching radiation levels beyond the ideal black body. This is the first demonstration of near field heat transfer over large areas in a fully microfabricated device including a gap effect study. |
| Databáze: | OpenAIRE |
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