Methodology for Analysis of Electrical Breakdown In Micrometer gaps in Tip-To-Plane Configuration
| Autor: | Kemas M Tofani, Ngapuli I. Sinisuka, Kremena Makasheva, Jean-Pascal Cambronne, Sorin Dinculescu |
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| Přispěvatelé: | Matériaux Diélectriques dans la Conversion d’Energie (LAPLACE-MDCE), LAboratoire PLasma et Conversion d'Energie (LAPLACE), Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées, Matériaux et Procédés Plasmas (LAPLACE-MPP) |
| Jazyk: | angličtina |
| Rok vydání: | 2018 |
| Předmět: |
Materials science
Electrical breakdown Thermionic emission 02 engineering and technology 01 natural sciences law.invention Micrometre [SPI]Engineering Sciences [physics] law Electric field 0103 physical sciences Breakdown voltage PVD process 010302 applied physics business.industry field emission 021001 nanoscience & nanotechnology Cathode Field electron emission Paschen's law electrical breakdown Optoelectronics Electric discharge thermionic emission 0210 nano-technology business |
| Zdroj: | 2018 IEEE 13th Nanotechnology Materials and Devices Conference (NMDC) 2018 IEEE 13th Nanotechnology Materials and Devices Conference (NMDC), Oct 2018, Portland, United States. pp.1-4, ⟨10.1109/NMDC.2018.8605855⟩ |
| DOI: | 10.1109/NMDC.2018.8605855⟩ |
| Popis: | International audience; Better understanding of the electrical behavior of miniaturized electrical devices is largely supported by the need to reduce losses and to prevent operational failure caused by electrical breakdown or electrical discharge. In large scale electrode separation, the breakdown voltage is well described by the Paschen's law. However, when the inter-electrode gaps are below 10 µm a departure from the Paschen's law is observed. The current research is focused on development of methodology for analysis of the electrical breakdown behavior in micrometer gaps and the description of the underlying mechanisms. The experiments were performed for inter-electrode gaps from 1 µm to 10 µm by using piezoelectric system to control the separation in tip-to-plane configuration for which a divergence of the electric field is imposed. The obtained results show that the field electron emission enhanced by the thermionic emission becomes the main mechanism for electrical breakdown under the above conditions. |
| Databáze: | OpenAIRE |
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