TITANOCENE-DICHLORIDE AS A METALORGANIC SOURCE FOR TITANIUM CARBIDE

Autor:	G. Huchet, J. Slifirski, Francis Teyssandier
Rok vydání:	1991
Předmět:	chemistry.chemical_compound Titanium carbide Materials science chemistry [PHYS.HIST]Physics [physics]/Physics archives Metallurgy General Physics and Astronomy Titanocene dichloride 7. Clean energy Nuclear chemistry
Zdroj:	Journal de Physique IV Proceedings Journal de Physique IV Proceedings, EDP Sciences, 1991, 02 (C2), pp.C2-625-C2-631. ⟨10.1051/jp4:1991275⟩
ISSN:	1155-4339 1764-7177
DOI:	10.1051/jp4:1991275
Popis:	The use of titanocene-dichloride (Cp2TiCl2) as a metalorganic precursor for TiC coating provides layers of very different quality according to its temperature of vaporization in a cold wall CVD reactor. The deposits observed by SEM and characterized by EPMA are related to the experimental procedure. The thermal behavior of the precursor investigated by thermogravimetry (TG), thermogravimetry coupled with differential thermal analysis (TG-DTA) and mass spectroscopy (MS) is used to determine the structural state of Cp2TiCl2 active from a CVD point of view.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::adf11630817e6bfbf2aaae4759607ca5 https://doi.org/10.1051/jp4:1991275 Zobrazit plný text záznamu