Self heating under RF power in BAW SMR and its predictive 1D thermal model
| Autor: | G. Parat, P. Waltz, Skandar Basrour, R.Y. Fillit, Philippe Renaux, Cedrick Chappaz, D. Mercier, D. Bloch, Nizar Ben Hassine, Brice Ivira |
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| Přispěvatelé: | Techniques of Informatics and Microelectronics for integrated systems Architecture (TIMA), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA), STMicroelectronics [Crolles] (ST-CROLLES), Laboratoire d'Electronique et des Technologies de l'Information (CEA-LETI), Université Grenoble Alpes (UGA)-Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Centre Science des Matériaux et des Structures (SMS-ENSMSE), École des Mines de Saint-Étienne (Mines Saint-Étienne MSE), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés (TIMA), Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)) |
| Jazyk: | angličtina |
| Rok vydání: | 2009 |
| Předmět: |
Computer science
Acoustics Thermal resistance RF power amplifier 7. Clean energy 01 natural sciences Temperature measurement Finite element method Power (physics) Resonator Reliability (semiconductor) PACS 85.42 0103 physical sciences Electronic engineering Radio frequency [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics 010301 acoustics |
| Zdroj: | Proc. of Joint Meeting of the 23rd European Frequency and Time Forum/IEEE International Frequency Control Symposium Joint Meeting of the 23rd European Frequency and Time Forum/IEEE International Frequency Control Symposium Joint Meeting of the 23rd European Frequency and Time Forum/IEEE International Frequency Control Symposium, Apr 2009, Besançon, France. pp.237-240, ⟨10.1109/FREQ.2009.5168176⟩ |
| Popis: | ISBN 978-1-4244-3511-1; International audience; This paper intends to provide a contribution for a better understanding of the self-heating effect in BAW SMR by developing a predictive 1D-model. Knowing the power dissipated inside the SMR, the presented model allows us estimating the temperature distribution inside the different layers of resonators used to build BAW filters. Model is compared with both experimental measurements and Finite Elements Analysis. Conclusions concerning the device reliability can eventually be drawn. |
| Databáze: | OpenAIRE |
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