Hybrid layered polymer slot waveguide Young interferometer
| Autor: | Jyrki Saarinen, Matthieu Roussey, Sanna Aikio, Marianne Hiltunen, Jussi Hiltunen, Leila Ahmadi, Seppo Honkanen, Petri Stenberg |
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| Rok vydání: | 2016 |
| Předmět: |
Fabrication
Materials science ta114 ta213 business.industry Bilayer 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Atomic and Molecular Physics and Optics 010309 optics Slot-waveguide Atomic layer deposition Wavelength Interferometry Optics 0103 physical sciences 0210 nano-technology business Refractive index Electron-beam lithography |
| Zdroj: | Ahmadi, L, Hiltunen, M, Stenberg, P, Hiltunen, J, Aikio, S, Roussey, M, Saarinen, J & Honkanen, S 2016, ' Hybrid layered polymer slot waveguide Young interferometer ', Optics Express, vol. 24, no. 10, pp. 10275-10285 . https://doi.org/10.1364/OE.24.010275 |
| ISSN: | 1094-4087 |
| DOI: | 10.1364/OE.24.010275 |
| Popis: | We demonstrate a polymer slot waveguide Young interferometer coated with a bilayer of Al2O3/TiO2. The approach enables relaxed dimensions of the polymer waveguide which simplifies the fabrication of the structure with a resolution of 50 nm. The layers were coated by an atomic layer deposition technique. The feasibility of the device was investigated by exploiting the interferometric structure as a bulk refractive index sensor operating at 975 nm wavelength for detection of an ethanol-water solution. A refractive index change of 1 × 10-6 RIU with a sensing length of only 800 µm was detected. The approach confirms the possibility of realizing a low cost device with a small footprint and enhanced sensitivity by employing the TiO2 rails in the sides of the slot waveguide. |
| Databáze: | OpenAIRE |
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