Fast and safe microwave-assisted glass channel-shaped microstructure fabrication
| Autor: | Zacheo, A., Zizzari, A., Perrone, E., Carbone, L., Giancane, G., Valli, L., Rinaldi, R., Arima, V. |
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| Přispěvatelé: | Zacheo, Antonella, Zizzari, Alessandra, Perrone, E, Carbone, Luigi, Giancane, Gabriele, Valli, Ludovico, Rinaldi, Rosaria, Arima, Valentina |
| Rok vydání: | 2015 |
| Předmět: |
Glass etching
Materials science Microfluidics Biomedical Engineering Bioengineering Nanotechnology General Chemistry Microfluidic Analytical Techniques Microfluidic Analytical Technique Microstructure Biochemistry Isotropic etching Surface micromachining Gla glass microfabrication Microtechnology wet etching Glass Microwaves Microwave Communication channel |
| Zdroj: | Lab on a chip 15 (2015): 2395–2399. doi:10.1039/c4lc01419g info:cnr-pdr/source/autori:Zacheo, A.; Zacheo, A.; Zizzari, A.; Zizzari, A.; Perrone, E.; Carbone, L.; Giancane, G.; Valli, L.; Rinaldi, R.; Rinaldi, R.; Arima, V./titolo:Fast and safe microwave-assisted glass channel-shaped microstructure fabrication/doi:10.1039%2Fc4lc01419g/rivista:Lab on a chip (Print)/anno:2015/pagina_da:2395/pagina_a:2399/intervallo_pagine:2395–2399/volume:15 |
| ISSN: | 1473-0189 1473-0197 |
| Popis: | Glass micromachining is a basic technology to achieve microfluidic networks for lab-on-a-chip applications. Among several methods to microstructure glass, the simplest and most widely applied is wet chemical etching (WE). However, accurate control of the reaction conditions to perform reproducible, fast and safe glass etching is not straightforward. Herein, microwave-assisted WE is demonstrated to intensify the glass etching action under safe working and finely monitored operative conditions and to produce smooth deep channels in short processing times with reduced underetching effects. |
| Databáze: | OpenAIRE |
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