Deterministic Assembly of Arrays of Lithographically Defined WS2 and MoS2 Monolayer Features Directly From Multilayer Sources Into Van Der Waals Heterostructures
| Autor: | Ke Xu, Ali Javey, Wan Li, Hayden Taylor, Vu Nguyen, Hannah M. Gramling, Joel W. Ager, Der Hsien Lien, Daryl C. Chrzan, Hyungjin Kim, Clarissa M. Towle |
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| Rok vydání: | 2019 |
| Předmět: |
Materials science
WS2 02 engineering and technology Substrate (electronics) Manufacturing Engineering 010402 general chemistry 01 natural sciences Industrial and Manufacturing Engineering symbols.namesake Nanomanufacturing Monolayer Nanotechnology Dry transfer business.industry Process Chemistry and Technology Heterojunction Materials Engineering nanomanufacturing 021001 nanoscience & nanotechnology exfoliation 2D materials Exfoliation joint 0104 chemical sciences Mechanics of Materials symbols van der Waals integration Optoelectronics Adhesive van der Waals force 0210 nano-technology business MoS2 optoelectronic |
| Zdroj: | Journal of Micro and Nano-Manufacturing, vol 7, iss 4 |
| Popis: | Author(s): Nguyen, V; Gramling, H; Towle, C; Li, W; Lien, DH; Kim, H; Chrzan, DC; Javey, A; Xu, K; Ager, J; Taylor, H | Abstract: One of the major challenges in the van der Waals (vdW) integration of two-dimensional (2D) materials is achieving high-yield and high-throughput assembly of predefined sequences of monolayers into heterostructure arrays. Mechanical exfoliation has recently been studied as a promising technique to transfer monolayers from a multilayer source synthesized by other techniques, allowing the deposition of a wide variety of 2D materials without exposing the target substrate to harsh synthesis conditions. Although a variety of processes have been developed to exfoliate the 2D materials mechanically from the source and place them deterministically onto a target substrate, they can typically transfer only either a wafer-scale blanket or one small flake at a time with uncontrolled size and shape. Here, we present a method to assemble arrays of lithographically defined monolayer WS2 and MoS2 features from multilayer sources and directly transfer them in a deterministic manner onto target substrates. This exfoliate-align-release process - without the need of an intermediate carrier substrate - is enabled by combining a patterned, gold-mediated exfoliation technique with a new optically transparent, heat-releasable adhesive. WS2/MoS2 vdW heterostructure arrays produced by this method show the expected interlayer exciton between the monolayers. Light-emitting devices using WS2 monolayers were also demonstrated, proving the functionality of the fabricated materials. Our work demonstrates a significant step toward developing mechanical exfoliation as a scalable dry transfer technique for the manufacturing of functional, atomically thin materials. |
| Databáze: | OpenAIRE |
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