| Autor: |
Jesús Liñares, Manuel P. Cagigal, Carlos Montero-Orille, Vicente Moreno, Héctor González-Núñez, Xesús Prieto-Blanco |
| Jazyk: |
angličtina |
| Rok vydání: |
2020 |
| Předmět: |
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| Zdroj: |
EPJ Web of Conferences, Vol 238, p 02004 (2020) |
| Popis: |
Photolithography combined with ion-exchange in glass is a well-known technology that can be applied to develop many different optical devices. In this work, we present the complete procedure to generate small circular phase-shift masks with diameters of only a few microns and high control in the phase change produced. It is a strategic element in applications such as optical astronomy. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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