Deposition of nanoscale LiPON films by high-frequency magnetron sputtering
| Autor: | V'yunov O. I., Kovalenko L. L., Belous A. G., Bohnke O., Bohnke C. |
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| Jazyk: | angličtina |
| Rok vydání: | 2014 |
| Předmět: | |
| DOI: | 10.5281/zenodo.3633922 |
| Popis: | The construction of laboratory installation for the fabrication of nanoscale amorphous films of lithium phosphorus oxynitride (LiPON) by high-frequency magnetron sputtering is described. |
| Databáze: | OpenAIRE |
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