| Autor: |
Robert Barlovic, Andre Holfeld, Jan Räbiger |
| Rok vydání: |
2007 |
| Předmět: |
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| Zdroj: |
Wiley StatsRef: Statistics Reference |
| DOI: |
10.1002/9780470061572.eqr152 |
| Popis: |
The task of sampling in state-of-the-art semiconductor manufacturing is to provide relevant metrology data for a representative part of the population in order to monitor and maintain the process, thereby minimizing the risk of processing errors/faults. The decision process itself is restricted by certain expense criteria. Thus, sampling has to select the appropriate material for metrology based on manufacturing needs while fulfilling manufacturing constraints. Keywords: sampling; metrology; SPC ; APC ; semiconductor manufacturing; factory automation |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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