PECVD SiNx Thin Films for Protecting Highly Reflective Silver Mirrors: Are They Better Than ALD AlOx Films?
| Autor: | Patrick Chapon, Nataliya Kundikova, Guili Zhao, D. Daineka, Pavel Bulkin |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: |
Materials science
PECVD 02 engineering and technology pulsed GD-OES 01 natural sciences Corrosion 010309 optics Plasma-enhanced chemical vapor deposition Spectrophotometry 0103 physical sciences Microscopy Materials Chemistry medicine Thin film Deposition (law) medicine.diagnostic_test business.industry Drop (liquid) Surfaces and Interfaces Plasma 021001 nanoscience & nanotechnology Engineering (General). Civil engineering (General) front surface silver mirrors Surfaces Coatings and Films Optoelectronics protective coatings TA1-2040 0210 nano-technology business |
| Zdroj: | Coatings, Vol 11, Iss 771, p 771 (2021) Coatings Volume 11 Issue 7 |
| ISSN: | 2079-6412 |
| Popis: | Protection of silver surface from corrosion is an important topic, as this metal is highly susceptible to damage by atomic oxygen, halogenated, acidic and sulfur-containing molecules. Protective coatings need to be efficient at relatively small thicknesses, transparent and must not affect the surface in any detrimental way, during the deposition or over its lifetime. We compare PECVD-deposited SiNx films to efficiency of ALD-deposited AlOx films as protectors of front surface silver mirrors against damage by oxygen plasma. Films of different thickness were deposited at room temperature and exposed to O2 ECR-plasma for various durations. Results were analyzed with optical and SEM microscopy, pulsed GD-OES, spectroscopic ellipsometry and spectrophotometry on reflection. Studies indicate that both films provide protection after certain minimal thickness. While this critical thickness seems to be smaller for SiNx films during short plasma exposures, longer plasma treatment reveals that the local defects in PECVD-deposited films (most likely due to erosion of some regions of the film and pinholes) steadily multiply with time of treatment and lead to slow drop of reflectance of SiNx-protected mirrors, whereas we showed before that ALD-deposited AlOx films reliably protect silver surface during long plasma exposures. |
| Databáze: | OpenAIRE |
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