Fabrication of Nanopore on Electron Beam Induced Membrane for Single Molecule Analysis
| Autor: | Sae-Joong Oh, Seong Soo Choi, Jung Ho Yoo, Kyoung Jin Park, Tokutaro Yamaguchi, Chul Hee Han, Myoung Jin Park, Yong-Sang Kim, Nam Kyou Park |
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| Rok vydání: | 2016 |
| Předmět: | |
| Zdroj: | ECS Transactions. 75:281-287 |
| ISSN: | 1938-6737 1938-5862 |
| DOI: | 10.1149/07516.0281ecst |
| Popis: | Recently there have been considerable interests about the fabrication of nanopore array for optical detection of single molecule analysis. So far, the nanopores on the SiN or graphene membrane were fabricated and utilized for genome sequencing with an electrically driven and electrical detection technique. We report fabrication of nanopore formation on pyramid by using focused ion beam technique and electron beam irradiation techniques. Under electron beam irradiation on the specimen, carbon incorporation with electron beam is reported, hence, the diffused membrane is believed to be amorphous carbon so far. However, we found that the membrane formed contains Au atoms. We found that the Au nanoparticles formed on the diffused membrane by using HRTEM (high resolution transmission electron microscopy). After the samples were kept under the room environments for several months, and up to one year, Au particles were formed on the diffused membrane. Au atoms less than 1 nm on the diffused membrane, the Au atoms cannot be detectable due to HR-TEM resolution limit. The larger particles grow bigger and bigger with expense of smaller particles via Ostwald ripening. We also observed bi-stable phases of Au particles during electron beam irradiation process via Spinodal decomposition. Fabricated nanopore integrated with Au particles can be utilized as optical nanopore for single molecule analysis. |
| Databáze: | OpenAIRE |
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