Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect
| Autor: | Lu-Jing Hou, Shinya Iwashita, You-Nian Wang, Julian Schulze, Uwe Czarnetzki, Quan-Zhi Zhang, Edmund Schüngel |
|---|---|
| Přispěvatelé: | Insitute for Plasma and Atomic Physics, Ruhr-Universität Bochum [Bochum], School of Physics and Optoelectronic Technology, Dalian University of Technology, Research Institute for Solid State Physics and Optics [Budapest], Wigner Research Centre for Physics [Budapest], Hungarian Academy of Sciences (MTA)-Hungarian Academy of Sciences (MTA), Max Planck Institute for Extraterrestrial Physics (MPE), Max-Planck-Gesellschaft |
| Jazyk: | angličtina |
| Rok vydání: | 2011 |
| Předmět: |
010302 applied physics
Acoustics and Ultrasonics 52.35.Fp Oscillation Chemistry 52.50.-b Resonance Electron Plasma 52.27.Cm Condensed Matter Physics 01 natural sciences 7. Clean energy 010305 fluids & plasmas Surfaces Coatings and Films Electronic Optical and Magnetic Materials Ion Electronegativity Physics::Plasma Physics 0103 physical sciences Electrode 52.80.Pi Voltage source Atomic physics |
| Zdroj: | Journal of Physics D: Applied Physics Journal of Physics D: Applied Physics, IOP Publishing, 2011, 44 (28), pp.285205. ⟨10.1088/0022-3727/44/28/285205⟩ |
| ISSN: | 0022-3727 1361-6463 |
| DOI: | 10.1088/0022-3727/44/28/285205⟩ |
| Popis: | International audience; By using a combined experimental, numerical and analytical approach, we investigate the control of plasma properties via the Electrical Asymmetry Effect (EAE) in a capacitively coupled oxygen discharge. In particular, we present the first experimental investigation of the EAE in electronegative discharges. A dual-frequency voltage source of 13.56 MHz and 27.12 MHz is applied to the powered electrode and the discharge symmetry is controlled by adjusting the phase angle θ between the two harmonics. It is found that the bulk position and density profiles of positive ions, negative ions, and electrons have a clear dependence on θ, while the peak densities and the electronegativity stay rather constant, largely due to the fact that the time averaged power absorption by electrons is almost independent of θ. This indicates that the ion flux towards the powered electrode remains almost constant. Meanwhile, the dc self-bias and, consequently, the sheath widths and potential profile can be effectively tuned by varying θ. This enables a flexible control of the ion bombarding energy at the electrode. Therefore, our work proves the effectiveness of the EAE to realize separate control of ion flux and ion energy in electronegative discharges. At low pressure, the strength of resonance oscillations, which are found in the current of asymmetric discharges, can be controlled with θ. |
| Databáze: | OpenAIRE |
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