Continuous and nanostructured TiO2 films grown by dc sputtering magnetron
| Autor: | Ruy Sanz, Font Ac, Manuel Hernández-Vélez, Vergara L, de Melo O, Olga Sánchez |
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| Rok vydání: | 2013 |
| Předmět: |
Materials science
Band gap Scanning electron microscope Biomedical Engineering Analytical chemistry Bioengineering General Chemistry Sputter deposition Condensed Matter Physics Rutherford backscattering spectrometry Sputtering Cavity magnetron General Materials Science Thin film High-power impulse magnetron sputtering |
| Zdroj: | Journal of nanoscience and nanotechnology. 12(12) |
| ISSN: | 1533-4880 |
| Popis: | The growth of Anatase nanostructured films using dc reactive magnetron sputtering and post-annealing treatment is reported. TiO2 has been deposited on Porous Anodic Alumina Films used as templates which were previously grown in phosphoric acid solution and etched to modify their pore diameters. This synthesis via results in the formation of vertically aligned and spatially ordered TiO2 nanostructures replicating the underlying template. Previously, the growth optimization of TiO2 thin films deposited by dc magnetron sputtering on flat silicon substrates was done. The crystalline structure and Ti in-depth concentration profile were determined by grazing incidence X-ray diffraction and Rutherford backscattering spectrometry, respectively. The surface morphology of the samples was explored by mean of a Field Emission Gun scanning electron microscope. Optical properties of the nanostructured samples were studied by using the reflectance spectra received in the UV-visible range. In these spectra different band gap values and complex light absorption features were observed. |
| Databáze: | OpenAIRE |
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