Real-time observation of rotational twin formation during molecular-beam epitaxial growth of GaAs on Si (111) by x-ray diffraction

Autor: Yuka Nakata, Kazuma Ikeda, Hirotaka Geka, Yoshitaka Moriyasu, Masamitu Takahasi, Osamu Morohara, Yoshio Ohshita, Hidetoshi Suzuki
Rok vydání: 2016
Předmět:
Zdroj: AIP Advances, Vol 6, Iss 3, Pp 035303-035303-6 (2016)
ISSN: 2158-3226
DOI: 10.1063/1.4943511
Popis: The formation and evolution of rotational twin (TW) domains introduced by a stacking fault during molecular-beam epitaxial growth of GaAs on Si (111) substrates were studied by in situ x-ray diffraction. To modify the volume ratio of TW to total GaAs domains, GaAs was deposited under high and low group V/group III (V/III) flux ratios. For low V/III, there was less nucleation of TW than normal growth (NG) domains, although the NG and TW growth rates were similar. For high V/III, the NG and TW growth rates varied until a few GaAs monolayers were deposited; the mean TW domain size was smaller for all film thicknesses.
Databáze: OpenAIRE