Multiplexed functionalization of nanoelectromechanical systems with photopatterned molecularly imprinted polymers
| Autor: | Liviu Nicu, B Tse Sum Bui, Fabrice Mathieu, Thierry Leichle, Pattamon Teerapanich, Karsten Haupt, Denis Dezest |
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| Přispěvatelé: | Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées, Équipe Microsystèmes électromécaniques (LAAS-MEMS), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Service Instrumentation Conception Caractérisation (LAAS-I2C), Sorbonne Université (SU), Université de Technologie de Compiègne (UTC), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Génie Enzymatique et Cellulaire (GEC), Université de Technologie de Compiègne (UTC)-Université de Picardie Jules Verne (UPJV)-Centre National de la Recherche Scientifique (CNRS) |
| Jazyk: | angličtina |
| Rok vydání: | 2019 |
| Předmět: |
Microelectromechanical systems
chemistry.chemical_classification Nanoelectromechanical systems Materials science Mechanical Engineering Molecularly imprinted polymer Nanotechnology 02 engineering and technology Polymer 021001 nanoscience & nanotechnology Electronic Optical and Magnetic Materials Molecular recognition chemistry Mechanics of Materials Surface modification Electrical and Electronic Engineering [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics 0210 nano-technology Biosensor Microfabrication |
| Zdroj: | Journal of Micromechanics and Microengineering Journal of Micromechanics and Microengineering, IOP Publishing, 2019, 29 (2), pp.025013. ⟨10.1088/1361-6439/aaf84e⟩ Journal of Micromechanics and Microengineering, 2019, 29 (2), pp.025013. ⟨10.1088/1361-6439/aaf84e⟩ |
| ISSN: | 0960-1317 1361-6439 |
| DOI: | 10.1088/1361-6439/aaf84e⟩ |
| Popis: | International audience; Implementing dedicated and reliable biochemical recognition functionalities onto nanoelectromechanical systems (NEMS) is of primary importance for their development as ultra-sensitive and highly-integrated biosensing devices. In this paper, we demonstrate the large-scale and multiplexed integration of molecularly imprinted polymers (MIPs) as highly stable biomimetic receptors onto arrays of nanocantilevers. Integration is carried out by spin-coating and photopatterning the polymer layers before releasing the nanostructures. We demonstrate that these biomimetic layers are robust enough to withstand the wet-etch of the sacrificial layer making this functionalization strategy compatible with further MEMS/NEMS processing. As a proof of concept, we fabricate NEMS resonators coated with a MIP using Boc-L-phenylalanine as the template molecule. We demonstrate the preserved molecular recognition ability of the patterned sensitive layer through the fluorescence detection of dansyl-L-phenylalanine, a fluorescent derivative of the template, and the mechanical integrity of the resonators by means of resonant frequency measurements. |
| Databáze: | OpenAIRE |
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