Doping profile extraction in thin SOI films: application to A2RAM

Autor: Maryline Bawedin, S. Cristoloveanu, F. Tcheme Wakam, Sebastien Martinie, J.-Ch. Barbe, Gerard Ghibaudo, Joris Lacord
Přispěvatelé: Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation (IMEP-LAHC ), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019]), ANR-10-LABX-0055,MINOS Lab,Minatec Novel Devices Scaling Laboratory(2010), European Project: 687931,H2020,H2020-ICT-2015,REMINDER(2016), Lacord, Joris, Laboratoires d'excellence - Minatec Novel Devices Scaling Laboratory - - MINOS Lab2010 - ANR-10-LABX-0055 - LABX - VALID, Revolutionary embedded memory for internet of things devices and energy reduction - REMINDER - - H20202016-01-01 - 2018-12-31 - 687931 - VALID
Jazyk: angličtina
Rok vydání: 2018
Předmět:
Materials science
Silicon
electrical characterization
[SPI] Engineering Sciences [physics]
[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
chemistry.chemical_element
Silicon on insulator
02 engineering and technology
01 natural sciences
[SPI]Engineering Sciences [physics]
Memory cell
0103 physical sciences
Materials Chemistry
doping profile
Electrical and Electronic Engineering
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
ComputingMilieux_MISCELLANEOUS
Doping profile
010302 applied physics
SOI
business.industry
Extraction (chemistry)
Experimental data
021001 nanoscience & nanotechnology
Condensed Matter Physics
Electronic
Optical and Magnetic Materials
C-V characteristic
chemistry
Logic gate
Optoelectronics
0210 nano-technology
business
A2RAM
Zdroj: EuroSOI-ULIS 2018
EuroSOI-ULIS 2018, Mar 2018, Granada, Spain
Solid-State Electronics
Solid-State Electronics, Elsevier, 2019, 159, pp.3-11. ⟨10.1016/j.sse.2019.03.038⟩
2018 EUROSOI-ULIS Proceedings
2018 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)
2018 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), Mar 2018, Granada, Spain. pp.1-4, ⟨10.1109/ULIS.2018.8354339⟩
Solid-State Electronics, 2019, 159, pp.3-11. ⟨10.1016/j.sse.2019.03.038⟩
HAL
ISSN: 0038-1101
DOI: 10.1016/j.sse.2019.03.038⟩
Popis: session 1: Fabrication and Process characterization; International audience; We propose for the first time a method based on C-V measurement to extract the bridge doping profile which governs the A2RAM performances. Assessed with TCAD simulation and simple extraction model adapted from bulk devices, this technique is validated with experimental data.
Databáze: OpenAIRE
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