Extreme ultraviolet photon conversion efficiency of tetraphenyl butadiene
| Autor: | Robert E. Vest, Charles W. Clark, Joshua R. Graybill, Alan K. Thompson, Michael A. Coplan, Chandra Shahi |
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| Rok vydání: | 2020 |
| Předmět: |
Spin coating
Materials science business.industry Extreme ultraviolet lithography Analytical chemistry Tetraphenyl butadiene Phosphor Chemical vapor deposition 01 natural sciences Atomic and Molecular Physics and Optics 010309 optics chemistry.chemical_compound Optics chemistry Extreme ultraviolet 0103 physical sciences Polystyrene Electrical and Electronic Engineering business Engineering (miscellaneous) Visible spectrum |
| Zdroj: | Applied optics. 59(4) |
| ISSN: | 1539-4522 |
| Popis: | Extreme ultraviolet (EUV) radiation can be converted to visible light using tetraphenyl butadiene (TPB) as a phosphor. 1 µm films of TPB were prepared using thermal vapor deposition of the pure material and by spin coating suspensions of TPB in high-molecular-weight polystyrene/toluene solutions. Calibrated sources and detectors were used to determine the effective photon conversion efficiency of the films for incident EUV radiation in the wavelength range of 125 n m ≤ λ ≤ 200 n m . After exposure to atmosphere, the efficiency of the vapor-deposited films decreased significantly, while the efficiency of the spin-coated films remained unchanged. The production of TPB films by spin coating offers the advantages of simplicity and long-term stability. |
| Databáze: | OpenAIRE |
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