Popis: |
The reaction of Zn(CH3)2 and activated H2O produced in a reaction of H2 and O2 on a Pt catalyst and effused from a nozzle was examined both experimentally and theoretically. This reaction has been shown to be effective in the preparation of high-quality ZnO films. Laser-induced fluorescence measurements showed that radical species, such as H atoms and OH radicals, do not play major roles. The rotational temperature of H2O, measured with a coherent anti-Stokes Raman scattering technique, was 250 K. This low rotational temperature suggests that H2O molecules must be accelerated along the beam axis and that the collisional energy between Zn(CH3)2 and H2O is as high as 43 kJ mol-1. This energy is higher than the potential barrier to produce HOZnCH3+CH4, 38 kJ mol-1, obtained by ab initio calculations at the MP2/LANL2DZ level of theory. HOZnCH3 thus produced can be the strongest candidate ZnO film precursor. |