A simple way to obtain backscattered electron images in a scanning transmission electron microscope
| Autor: | Shigeyasu Tanaka, Hiroki Tsuruta, Takayoshi Tanji, Chiaki Morita |
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| Rok vydání: | 2014 |
| Předmět: |
Conventional transmission electron microscope
Microscope Materials science Physics::Instrumentation and Detectors business.industry Scanning confocal electron microscopy law.invention Optics Annular dark-field imaging Electron tomography Structural Biology law Scanning transmission electron microscopy Energy filtered transmission electron microscopy High Energy Physics::Experiment Radiology Nuclear Medicine and imaging Electron beam-induced deposition business Instrumentation |
| Zdroj: | Microscopy. 63:333-336 |
| ISSN: | 2050-5701 2050-5698 |
| Popis: | We have fabricated a simple detector for backscattered electrons (BSEs) and incorporated the detector into a scanning transmission electron microscope (STEM) sample holder. Our detector was made from a 4-mm(2) Si chip. The fabrication procedure was easy, and similar to a standard transmission electron microscopy (TEM) sample thinning process based on ion milling. A TEM grid containing particle objects was fixed to the detector with a silver paste. Observations were carried out using samples of Au and latex particles at 75 and 200 kV. Such a detector provides an easy way to obtain BSE images in an STEM. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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