Hyper frequency modeling of resonated systems based on piezoelectric LiTaO3 thin layers
| Autor: | Sami Youssef, Jean Podlecki, Youssef Zaatar, Alain Foucaran, R. Al Asmar, Cynthia Eid |
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| Přispěvatelé: | Institut d’Electronique et des Systèmes (IES), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Matériaux, MicroCapteurs et Acoustique (M2A), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Science et Ingénierie des Matériaux et Procédés (SIMaP), Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut de Chimie du CNRS (INC)-Institut National Polytechnique de Grenoble (INPG), Ecole supérieure d'ingénieurs de Beyrouth (ESIB), Université Saint-Joseph de Beyrouth (USJ), Micro électronique, Composants, Systèmes, Efficacité Energétique (M@CSEE), Université Saint-Esprit de Kaslik (USEK), Lebanese Univ, Fac Sci 2, EC2M |
| Jazyk: | angličtina |
| Rok vydání: | 2009 |
| Předmět: |
010302 applied physics
Piezoelectric coefficient Thin layers Materials science Silicon business.industry General Engineering chemistry.chemical_element 02 engineering and technology Substrate (electronics) 021001 nanoscience & nanotechnology 01 natural sciences Piezoelectricity [SPI.TRON]Engineering Sciences [physics]/Electronics Resonator Optics chemistry 0103 physical sciences Optoelectronics Reflection coefficient 0210 nano-technology business ComputingMilieux_MISCELLANEOUS Envelope (waves) |
| Zdroj: | Microelectronics Journal Microelectronics Journal, Elsevier, 2009, 40 (3), pp.624-627. ⟨10.1016/j.mejo.2008.06.050⟩ |
| ISSN: | 0026-2692 |
| DOI: | 10.1016/j.mejo.2008.06.050⟩ |
| Popis: | In this work, we discuss the piezoelectric activity of lithium tantalite (LiTaO3) thin layers and to more understand this phenomenon we have developed a model for our LiTaO3 resonators based on mason model and simulated the hyper frequency behavior. Our LiTaO3 resonators are made from three layers staked on silicon substrates. The aluminum thin film constitutes the external electrode, the platinum forms the internal electrode and the lithium tantalite constitutes the piezoelectric layer. Each element of these layers is represented by an arrangement of impedances. The simulation shows the reflection coefficient, ρ, as a function of the frequency. We observe a resonant frequency that decreases with the increase of the thickness of the piezoelectric LiTaO3 layers. A slight variation of this resonant frequency is obtained when comparing it with that of the uncharged piezoelectric device, which is due to the different layers loading the system. Over oscillations superposing to the envelope are observed and found to be related to the propagation of the acoustic wave in the silicon substrate. From these over oscillations one can see that this system can be used as an efficient method to calculate the thickness of any substrate. |
| Databáze: | OpenAIRE |
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