Large-Signal Equivalent-Circuit Model of Asymmetric Electrostatic Transducers

Autor:	Jorge M. Monsalve, Lutz Ehrig, Harald Schenk, Bert Kaiser, Holger Conrad, Michael Stolz, David Schuffenhauer, H. Schenk, Anton Melnikov
Přispěvatelé:	Publica
Rok vydání:	2022
Předmět:	Physics Microphone Acoustics Computer Science Applications law.invention Capacitor Nonlinear system Transducer Computer Science::Sound Control and Systems Engineering law Distortion Equivalent circuit Electrical and Electronic Engineering Charge amplifier Network model
Zdroj:	IEEE/ASME Transactions on Mechatronics. 27:2612-2622
ISSN:	1941-014X 1083-4435
Popis:	This article presents a circuit model that is able to capture the full nonlinear behavior of an asymmetric electrostatic transducer whose dynamics are governed by a single degree of freedom. Effects such as stress-stiffening and pull-in are accounted for. The simulation of a displacement-dependent capacitor and a nonlinear spring is accomplished with arbitrary behavioral sources, which are a standard component of circuit simulators. As an application example, the parameters of the model were fitted to emulate the behavior of an electrostatic MEMS loudspeaker whose finite-element (FEM) simulations and acoustic characterisation where already reported in the literature. The obtained waveforms show good agreement with the amplitude and distortion that was reported both in the transient FEM simulations and in the experimental measurements. This model is also used to predict the performance of this device as a microphone, coupling it to a two-stage charge amplifier. Additional complex behaviors can be introduced to this network model if it is required.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a384219e5ffa4bed75af03c67c7fac78 https://doi.org/10.1109/tmech.2021.3112267 Zobrazit plný text záznamu