A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip
| Autor: | Joost Melai, M. Fransen, H. van der Graaf, J. Timmermans, Cora Salm, Jurriaan Schmitz, M. Chefdeville, V.M.B. Carballo |
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| Jazyk: | angličtina |
| Rok vydání: | 2008 |
| Předmět: |
Wafer-scale integration
Fabrication Materials science business.industry Physics::Instrumentation and Detectors Detector Physics::Optics Radiation Particle detector Electronic Optical and Magnetic Materials Computer Science::Other Radiation detectors SU-8 Wafer postprocessing Optics CMOS Microsystem Electronic engineering Miniaturization SC-RID: Radiation Imaging detectors Electrical and Electronic Engineering business Nuclear imaging Terms—Microsensors |
| Zdroj: | IEEE electron device letters, 29(DTR08-9/6):10.1109/LED.2008.925649, 585-588. IEEE |
| ISSN: | 0741-3106 |
| DOI: | 10.1109/LED.2008.925649, |
| Popis: | An unpackaged microchip is used as the sensing element in a miniaturized gaseous proportional chamber. This letter reports on the fabrication and performance of a complete radiation imaging detector based on this principle. Our fabrication schemes are based on wafer-scale and chip-scale postprocessing. Compared to hybrid-assembled gaseous detectors, our microsystem shows superior alignment precision and energy resolution, and offers the capability to unambiguously reconstruct 3D radiation tracks on the spot. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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