Oscillating composition of Fe–W alloy thin films grown by magnetron co-sputtering
| Autor: | S. Laaroussi, Pierre-Olivier Renault, B. Boubeker, A.L. Thomann, P. Goudeau, Pascale Plantin, Pascal Brault, Thierry Sauvage |
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| Přispěvatelé: | Groupe de recherches sur l'énergétique des milieux ionisés (GREMI), Centre National de la Recherche Scientifique (CNRS)-Université d'Orléans (UO), Brault, Pascal |
| Jazyk: | angličtina |
| Rok vydání: | 2007 |
| Předmět: |
Materials science
Iron Alloy Analytical chemistry 02 engineering and technology Substrate (electronics) engineering.material 01 natural sciences Tungsten Sputtering PACS: 81.15.Cd 68.55.Jk 68.55.Nq 0103 physical sciences Materials Chemistry Thin film Chemical composition 010302 applied physics [SPI.PLASMA]Engineering Sciences [physics]/Plasmas [SPI.PLASMA] Engineering Sciences [physics]/Plasmas Surfaces and Interfaces General Chemistry Sputter deposition 021001 nanoscience & nanotechnology Condensed Matter Physics Surfaces Coatings and Films Physical vapor deposition Cavity magnetron engineering 0210 nano-technology Magnetron sputtering |
| Zdroj: | Surface and Coatings Technology Surface and Coatings Technology, Elsevier, 2007, 201, pp.7115-7121 |
| ISSN: | 0257-8972 |
| Popis: | Fe–W alloy coatings were deposited by D.C. magnetron co-sputtering at room temperature. Initial results from Rutherford Backscattering Spectroscopy (RBS) have evidenced in-depth variation in the film chemical composition, which oscillates between Fe 0.19 W 0.81 and Fe 0.29 W 0.71 . The deposits are multilayer systems composed of elementary alloy layers, with a thickness of the order of several tens of nanometers. In the present work, we study the influence of two deposition parameters on this particular in-depth composition modulation: substrate rotation rate and deposition time. The thickness of the elementary layers depends on the rotation rate of the substrate holder, as expected from what is reported in the literature on pure nanolayer synthesis in planar magnetron geometry. Surprisingly, the composition oscillations disappear for the longest deposition times (above 3 min). Alloy films (with or without composition oscillations) are found to exhibit the same morphology and crystalline structure as pure W. It is evidenced that Fe atoms are located in substitution in the W atomic structure and that an amorphous phase of alloy is also formed. |
| Databáze: | OpenAIRE |
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