Small-size MEMS accelerometer encapsulated in vacuum using Sigma-Delta modulation
| Autor: | Joao Gaspar, Burkhard Kuhlmann, Vasco António Lourenço Lima, Jorge Cabral, Luís A. Rocha |
|---|---|
| Přispěvatelé: | Universidade do Minho |
| Jazyk: | angličtina |
| Rok vydání: | 2020 |
| Předmět: |
Microelectromechanical systems
Physics Science & Technology business.industry 020208 electrical & electronic engineering Bandwidth (signal processing) vacuum 02 engineering and technology Accelerometer Delta-sigma modulation Noise figure 01 natural sciences accelerometer MEMS Gate array 0103 physical sciences 0202 electrical engineering electronic engineering information engineering Figure of merit Optoelectronics 010306 general physics business Field-programmable gate array Sigma-Delta |
| Popis: | A vacuum encapsulated MEMS accelerometer using Sigma-Delta modulation is here presented. Three different modulation orders (second, third, and fourth) were implemented in a field-programable gate array (FPGA), enabling flexibility for tuning the loop parameters in real-time. Three devices were measured, and the results are in good agreement with simulations performed in Simulink. A noise figure of 123 μg/√Hz for a bandwidth of 400 Hz and a range of at least ±1 g was experimentally measured. A figure of merit considering device size and bandwidth is proposed, highlighting the relevance of the results for the current state of the art. FCT - Fundação para a Ciência e a Tecnologia (PDE/BDE/114563/2016) |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|