Scalable methods for ultra-smooth platinum in nanoscale devices
| Autor: | Stefanie S. Jeffrey, Charmaine Chia, Roger T. Howe |
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| Rok vydání: | 2019 |
| Předmět: |
Materials science
lcsh:Electronics lcsh:TK7800-8360 chemistry.chemical_element Molecular electronics Nanotechnology Surface finish Condensed Matter Physics Stripping (fiber) Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Grain growth chemistry Chemical-mechanical planarization lcsh:Technology (General) lcsh:T1-995 Adhesive Electrical and Electronic Engineering Platinum Nanoscopic scale |
| Zdroj: | Micro and Nano Engineering, Vol 3, Iss, Pp 50-58 (2019) |
| ISSN: | 2590-0072 |
| DOI: | 10.1016/j.mne.2019.04.002 |
| Popis: | Ultra-smooth metal structures are increasingly important in nanoscale device applications, from photonics to molecular electronics and 2D material growth. We describe three methods for achieving ultra-smooth platinum: patterned template stripping, chemical mechanical polishing and giant grain growth. Specifically, we demonstrate 1) the first use of spin-on glass as an adhesive for the transfer of a patterned platinum film via template stripping, enabling the film to be exposed to harsher solvents and at higher temperatures; 2) an updated CMP process for platinum with slurry materials that are currently available; 3) a giant grain growth process on a 4″ quartz substrate that uses a thinner Pt film than previously reported. Overall, root mean squared film roughness was decreased from ~14 Å for as-deposited platinum to |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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