Fluid-Guided CVD Growth for Large-Scale Monolayer Two-Dimensional Materials
| Autor: | Nicholas Yoo, Dong Zhou, Ji Lang, Raymond R. Unocic, Bo Li, Qianhong Wu |
|---|---|
| Rok vydání: | 2020 |
| Předmět: |
Condensed Matter - Materials Science
Materials science Scale (ratio) business.industry Materials Science (cond-mat.mtrl-sci) FOS: Physical sciences Physics - Applied Physics Applied Physics (physics.app-ph) 02 engineering and technology Computational fluid dynamics 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences 0104 chemical sciences Atmospheric pressure chemical vapor deposition Flow velocity Monolayer Shear stress General Materials Science Composite material 0210 nano-technology business |
| Zdroj: | ACS Applied Materials & Interfaces. 12:26342-26349 |
| ISSN: | 1944-8252 1944-8244 |
| Popis: | Atmospheric pressure chemical vapor deposition (APCVD) has been used extensively for synthesizing two-dimensional (2D) materials, due to its low cost and promise for high-quality monolayer crystal synthesis. However, the understanding of the reaction mechanism and the key parameters affecting the APCVD processes is still in its embryonic stage. Hence, the scalability of the APCVD method in achieving large scale continuous film remains very poor. Here, we use MoSe2 as a model system and present a fluid guided growth strategy for understanding and controlling the growth of 2D materials. Through the integration of experiment and computational fluid dynamics (CFD) analysis in the full-reactor scale, we identified three key parameters: precursor mixing, fluid velocity and shear stress, which play a critical role in the APCVD process. By modifying the geometry of the growth setup, to enhance precursor mixing and decrease nearby velocity shear rate and adjusting flow direction, we have successfully obtained inch-scale monolayer MoSe2. This unprecedented success of achieving scalable 2D materials through fluidic design lays the foundation for designing new CVD systems to achieve the scalable synthesis of nanomaterials. |
| Databáze: | OpenAIRE |
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