CMUT with mechanically coupled plate actuators for low frequencies
| Autor: | Michael Stolz, Sandro G. Koch, Marcel Krenkel, Mario Kupnik |
|---|---|
| Přispěvatelé: | Publica |
| Rok vydání: | 2019 |
| Předmět: |
Materials science
Acoustics 02 engineering and technology ultrasound transducer 01 natural sciences mechanical coupling Capacitive micromachined ultrasonic transducers 0103 physical sciences Electrical and Electronic Engineering 010301 acoustics Microelectromechanical systems CMUT ultrasound business.industry Mechanical Engineering Ultrasound 021001 nanoscience & nanotechnology analytical modeling Electronic Optical and Magnetic Materials ADMONT MEMS plate actuators Mechanics of Materials Ultrasonic sensor 0210 nano-technology Actuator business |
| Zdroj: | Journal of Micromechanics and Microengineering. 29:044001 |
| ISSN: | 1361-6439 0960-1317 |
| DOI: | 10.1088/1361-6439/ab035d |
| Popis: | In this paper we present a structural analytical model for a capacitivemicromachined ultrasonic transducer (CMUT), based on a sacricial releasefabrication process and comprised of electro-mechanical plate actuatorstransferring their motion to a coupling roof structure on top. The structurefeatures a larger average displacement compared to conventional designs at lower operational frequencies.Low operational frequencies in the range of 40 kHz to 1MHz are benecial forairborne applications due to their frequency-dependent strong wave attenuationin air, limiting the signal-to-noise ratio.The eigenfrequency in dependence of the roof mass is calculated analyticallyand lumped elements, which can be used in equivalent circuits, are extracted.In addition, nite element analyses utilizing a shell-beam model are conducted.Experimental results, based on digital holographic microscopy, reveal the usabilityof the deduced model within an uncertainty of 8 %.The developed dimensionless form of the analytical model can be used forfuture design purposes. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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