Designing transmitting CMUT cells for airborne applications
| Autor: | Abdullah Atalar, Akif Sinan Tasdelen, Hayrettin Koymen, Asli Unlugedik |
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| Přispěvatelé: | Atalar, Abdullah, Köymen, Hayrettin |
| Jazyk: | angličtina |
| Rok vydání: | 2014 |
| Předmět: |
Engineering
Acoustics and Ultrasonics Acoustics Transducers Nonlinear transduction Ultrasonic transducers Capacitive micromachined ultrasonic transducers Quality (physics) Quality factors Electrical and Electronic Engineering Instrumentation Arrays Performance limits Distance business.industry Air Capacitive micromachined ultrasonic transducer Silicon plates Radius Micromachined Ultrasonic Transducers Nonlinear system Transducer Sinusoidal voltage Ultrasonic sensor Sinusoidal-drive voltage business Airborne applications DC bias Voltage |
| Zdroj: | IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control |
| Popis: | Cataloged from PDF version of article. We report a new mode of airborne operation for capacitive micromachined ultrasonic transducers (CMUT), in which the plate motion spans the entire gap without collapsing and the transducer is driven by a sinusoidal voltage without a dc bias. We present equivalent-circuit-based design fundamentals for an airborne CMUT cell and verify the design targets using fabricated CMUTs. The performance limits for silicon plates are derived. We experimentally obtain 78.9 dB//20 mu Pa@1 m source level at 73.7 kHz, with a CMUT cell of radius 2.05 mm driven by 71 V sinusoidal drive voltage at half the frequency. The measured quality factor is 120. We also study and discuss the interaction of the nonlinear transduction force and the nonlinearity of the plate compliance. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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