A 3D pn junction structure for radiation energy conversion chip

Autor: Zhengyin Yu, Shaohui Xu, Lianwei Wang, Weili Lu, Zhitang Song, Xin-Ping Qu, Guo-Ping Ru, Jinlong Li
Rok vydání: 2006
Předmět:
Zdroj: Scopus-Elsevier
DOI: 10.1109/iwjt.2006.1669463
Popis: Macroporous silicon with well defined pattern on p-type silicon has been prepared by anodization in this report. A phosphorus diffusion step is employed for the formation of three dimensional pn junction structures. The I-V and C-V have been performed to characterize the "high aspect ratio" pn junction structure. Results have indicated the possibility for such a structure as the radiation conversion chip for future portable nuclear power cell.
Databáze: OpenAIRE