Practical application of direct electron detectors to EBSD mapping in 2D and 3D
| Autor: | Mark Stewart, Mark Gee, Ken Mingard, S. Vespucci, Carol Trager-Cowan |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Physics Ion beam business.industry Scanning electron microscope Detector 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Focused ion beam Sample (graphics) Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials QC350 Optics Electron diffraction 0103 physical sciences Medipix 0210 nano-technology business Instrumentation Electron backscatter diffraction |
| ISSN: | 0304-3991 |
| Popis: | The use of a direct electron detector for the simple acquisition of 2D electron backscatter diffraction (EBSD) maps and 3D EBSD datasets with a static sample geometry has been demonstrated in a focused ion beam scanning electron microscope. The small size and flexible connection of the Medipix direct electron detector enabled the mounting of sample and detector on the same stage at the short working distance required for the FIB. Comparison of 3D EBSD datasets acquired by this means and with conventional phosphor based EBSD detectors requiring sample movement showed that the former method with a static sample gave improved slice registration. However, for this sample detector configuration, significant heating by the detector caused sample drift. This drift and ion beam reheating both necessitated the use of fiducial marks to maintain stability during data acquisition. |
| Databáze: | OpenAIRE |
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