Wafer level characterisation of microelectrodes for electrochemical sensing applications
| Autor: | Adam A. Stokes, Ewen O. Blair, Anthony Buchoux, L. Parga Basanta, Stewart Smith, M. Normand, Andreas Tsiamis, Ilka Schmueser, Anthony J. Walton, Jamie R. K. Marland, Camelia Dunare |
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| Jazyk: | angličtina |
| Rok vydání: | 2018 |
| Předmět: |
Fabrication
Materials science 010401 analytical chemistry Nanotechnology 02 engineering and technology Photoresist 021001 nanoscience & nanotechnology 01 natural sciences 0104 chemical sciences Electrochemical gas sensor Microelectrode Resist TA164 Wafer Wafer dicing 0210 nano-technology Microfabrication |
| Zdroj: | Blair, E, Parga Basanta, L, Schmueser, I, Marland, J, Buchoux, A, Tsiamis, A, Dunare, C, Normand, M, Stokes, A, Walton, A & Smith, S 2018, Wafer Level Characterisation of Microelectrodes for Electrochemical Sensing Applications . in Proceedings of the IEEE International Conference on Microelectronics Test Structures ., 9-2, Institute of Electrical and Electronics Engineers (IEEE) . |
| Popis: | This work presents a system for the in-line wafer- level characterisation of electrochemical sensors. Typically, such sensors are first diced and packaged before being electro- chemically tested. By integrating their characterisation into the manufacturing process, the production of electrochemical sensors becomes more efficient and less expensive as they can be parametrically tested midway through the fabrication process, without the need to package them. This enables malfunctioning or failed devices to be identified before dicing and reduces costs as only functional devices are packaged (in many cases this can be more expensive than the sensor fabrication). This study describes wafer-level characterisation of a simple electrochemical sensor design using a photoresist hydrophobic corralling film for the electrolyte and a probe station for contacting to individual dies. |
| Databáze: | OpenAIRE |
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