Mueller matrix ellipsometer using dual continuously rotating anisotropic mirrors
| Autor: | Alexander Ruder, Mathias Schubert, Brandon Wright, René Feder, Eva Schubert, Ufuk Kilic, Matthew Hilfiker, Darin Peev, Craig M. Herzinger |
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| Přispěvatelé: | Publica |
| Jazyk: | angličtina |
| Rok vydání: | 2020 |
| Předmět: |
Materials science
business.industry Physics::Optics 02 engineering and technology Polarizer 021001 nanoscience & nanotechnology Polarization (waves) 01 natural sciences Atomic and Molecular Physics and Optics law.invention 010309 optics Wavelength symbols.namesake Optics law Ellipsometry 0103 physical sciences symbols Stokes parameters Mueller calculus Thin film 0210 nano-technology Anisotropy business |
| Popis: | We demonstrate calibration and operation of a single wavelength (660 nm) Mueller matrix ellipsometer in normal transmission configuration using dual continuously rotating anisotropic mirrors. The mirrors contain highly spatially coherent nanostructure slanted columnar titanium thin films deposited onto optically thick gold layers on glass substrates. Upon rotation around the mirror normal axis, sufficient modulation of the Stokes parameters of light reflected at oblique angle of incidence is achieved. Thereby, the mirrors can be used as a polarization state generator and polarization state analyzer in a generalized ellipsometry instrument. A Fourier expansion approach is found sufficient to render and calibrate the effects of the mirror rotations onto the polarized light train within the ellipsometer. The Mueller matrix elements of a set of anisotropic samples consisting of a linear polarizer and a linear retarder are measured and compared with model data, and very good agreement is observed. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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