Soft-x-ray projection imaging with a 1:1 ring-field optic

Autor:	William T. Silfvast, Donald Lawrence White, Richard R. Freeman, David L. Windt, A. A. MacDowell, John E. Bjorkholm, Obert R. Wood, Tanya E. Jewell, F. Zernike, Raissa M. D'Souza, Jeffrey Bokor, W. K. Waskiewicz, L. Eichner, Donald M. Tennant, Marc D. Himel, Kathleen Regina Early, P. P. Mulgrew, D. W. Taylor, L. H. Szeto
Rok vydání:	2010
Předmět:	Figuring Materials science business.industry Materials Science (miscellaneous) Resolution (electron density) X-ray optics Undulator Industrial and Manufacturing Engineering Numerical aperture Wavelength Optical coating Optics Business and International Management business Projection (set theory)
Zdroj:	Applied optics. 32(34)
ISSN:	1559-128X
Popis:	A molybdenum/silicon multilayer-coated 1:1 ring-field optic with a numerical aperture of 0.0835 is used to carry out soft-x-ray projection imaging with undulator radiation at 12.9 nm. An ideal optic of this type should be able to image 0.1-μm features with a contrast exceeding 90% at this wavelength. The useful resolution of our ring-field optic is experimentally found to be approximately 0.2 μm, probably because of the presence of substrate figuring errors.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9b89367464178bb023e913c6a1342663 https://pubmed.ncbi.nlm.nih.gov/20856570 Zobrazit plný text záznamu