Determination of band offsets in a-Si:H/c-Si heterojunctions from capacitance–voltage measurements: Capabilities and limits

Autor: S. Ibrahim, P.-J. Ribeyron, J. Damon-Lacoste, Y. Veschetti, P. Roca i Cabarrocas, Jean-Paul Kleider, Alexander S. Gudovskikh
Přispěvatelé: Laboratoire de génie électrique de Paris (LGEP), Université Paris-Sud - Paris 11 (UP11)-Université Pierre et Marie Curie - Paris 6 (UPMC)-Ecole Supérieure d'Electricité - SUPELEC (FRANCE)-Centre National de la Recherche Scientifique (CNRS)
Rok vydání: 2007
Předmět:
Zdroj: Thin Solid Films
Thin Solid Films, Elsevier, 2007, 515, pp.7481-7485
E-MRS 2006 Spring Meeting
E-MRS 2006 Spring Meeting, 2006, France
Thin Solid Films, 2007, 515, pp.7481-7485
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2006.11.198
Popis: The capabilities and limitations of the well-known C–V technique for the determination of the conduction band offsets in (n)a-Si:H/(p)c-Si heterojunctions are presented. In particular, the effects due to the presence of an inversion layer in c-Si and a non-negligible defect density at the a-Si:H/c-Si interface on the reliability of the C–V intercept method are discussed. The influence of the Fermi level positions in (p)c-Si and (n)a-Si:H on the inversion layer formation and the influence of the interface defect density have been analysed using numerical simulations and experimental measurements.
Databáze: OpenAIRE