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A polymer-based micro-bottle resonator coated with graphene oxide (GO) film is presented to improve the relative humidity (RH) sensing performance. Polymeric material Loctite 3525 was coated onto a quartz fiber and cured by using UV light irradiation and thermal reflow technology. A layer of GO film was prepared on the micro-bottle resonator by the dip impregnation method, which realized a high Q-factor (>104) transmission of energy by appropriately designing a wave-guide resonator coupling. By optimizing the concentration of GO dip impregnation solution, high sensitivity and figure of merit (FoM) of 0.161 nm/%RH and 2.01/%RH were achieved in the RH range of 22–81%. In addition, after high-temperature annealing at 300 °C, the temperature sensitivity decreased by an order of magnitude from 0.793 nm/°C to 0.068 nm/°C, which significantly reduces the cross-sensitivity between humidity and temperature. The proposed resonator has the advantages of being compact in size, low in cost, high sensitivity, and low in temperature crosstalk. |
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