Dust Successive Generations in Ar/SiH4: Dust Cloud Dynamics
| Autor: | M. Cavarroc, M. Mikikian, Y. Tessier, L. Boufendi, José Tito Mendonça, David P. Resendes, Padma K. Shukla |
|---|---|
| Přispěvatelé: | Groupe de recherches sur l'énergétique des milieux ionisés (GREMI), Centre National de la Recherche Scientifique (CNRS)-Université d'Orléans (UO), José Tito Mendonça, David P. Resendes, Padma K. Shukla |
| Jazyk: | angličtina |
| Rok vydání: | 2008 |
| Předmět: |
Materials science
Silanes Argon Silicon [SPI.PLASMA]Engineering Sciences [physics]/Plasmas Analytical chemistry Void Nanoparticle chemistry.chemical_element 020206 networking & telecommunications 02 engineering and technology Plasma 52.27.Lw Silane chemistry.chemical_compound chemistry [PHYS.PHYS.PHYS-PLASM-PH]Physics [physics]/Physics [physics]/Plasma Physics [physics.plasm-ph] Instabilities 0202 electrical engineering electronic engineering information engineering 020201 artificial intelligence & image processing Plasma diagnostics Thin film Dust particle growth |
| Zdroj: | MULTIFACETS OF DUSTY PLASMAS: Fifth International Conference on the Physics of Dusty Plasmas Fifth International Conference on the Physics of Dusty Plasmas Fifth International Conference on the Physics of Dusty Plasmas, May 2008, Ponta Delgada, Azores, Portugal. pp.285, ⟨10.1063/1.2997132⟩ |
| DOI: | 10.1063/1.2997132⟩ |
| Popis: | Copyright 2008 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in AIP Conference Proceedings and may be found at http://link.aip.org/link/?APCPCS/1041/285/1; International audience; Successive generations of dust particles in an Ar/SiH4 plasma, are shown to take place in the void region. We evidence that this cyclic phenomenon is also related to self-excited low frequency oscillations. These different results are obtained by correlating several diagnostics. We studied dust particle successive generations and the related dust cloud dynamics in silane based plasmas. Indeed, the growth of silicon nanoparticles is known to follow a well-defined cycle. Thanks to the correlation of various diagnostics (electrical, optical, ex-situ SEM), we evidenced a void region in the plasma and its specific structure. We especially showed that dust new generations grow inside this void region close to the plasma center. Moreover, an instability phenomenon linked to this cyclic growth in the void has been brought to the fore. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|