Field Emission Arrays from Graphite Fabricated by Laser Micromachining
| Autor: | Michael Bachmann, Rupert Schreiner, R. Lawrowski |
|---|---|
| Rok vydání: | 2021 |
| Předmět: |
Materials science
business.industry Process Chemistry and Technology Conical surface Laser Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Surface micromachining Field electron emission Nanoelectronics law Materials Chemistry Optoelectronics Work function Graphite Electrical and Electronic Engineering business Instrumentation Voltage |
| Zdroj: | 2021 34th International Vacuum Nanoelectronics Conference (IVNC). |
| Popis: | Arrays of 4x4 conical shaped emitters were directly structured by laser micromaching. Assembled as an electron source with a spacer and Si-grid, they were investigated by means of IV-measurement in ultra-high vacuum. The IV-measurements of the sample show integral emission currents up to 10 µA at a voltage of 1000 V (11 MV/m). Initially, an ideal FN-behaviour is noticeable. The deviation for higher voltage values in the FN-plot is caused by the change of the work function, which was proven by numerical calculations. |
| Databáze: | OpenAIRE |
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