The Thermal Drift Characteristics of Piezoresistive Pressure Sensor
| Autor: | N. Benmoussa, R. Otmani, Boumediene Benyoucef |
|---|---|
| Rok vydání: | 2011 |
| Předmět: |
Mobility model
Silicon Materials science business.industry Doping chemistry.chemical_element Thermal drift Piezoresistive coefficients Physics and Astronomy(all) chemistry Piezoresistivity Thermal Computer Science::Networking and Internet Architecture Pressure Optoelectronics Sensitivity (control systems) Carriers Mobility business Piezoresistive pressure sensors Sensor |
| Zdroj: | Physics Procedia. 21:47-52 |
| ISSN: | 1875-3892 |
| DOI: | 10.1016/j.phpro.2011.10.008 |
| Popis: | Piezoresistive pressure sensors based on silicon have a large thermal drift because of their high sensitivity to temperature. The study of the thermal behavior of these sensors is essential to define the parameters that cause the output characteristics drift. In this study, we adopted two different holes mobility models to determine how the temperature affect the sensor's gauges values. We calculated the thermal coefficients for both mobility models and we compared them with experimental results. Finally, we calculated the effect of temperature and doping concentration on the output characteristics of the sensor. This study allows us to predict the sensor behavior against temperature and to minimize this effect by optimizing the doping concentration. Seventh International Conference on Material Sciences, Physics Procedia, ISSN : 1875-3892, DOI: 10.1016/j.phpro.2011.10.008, Volume : 21, pp.47–52,2011. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|