Photolithographic structuring of stretchable conductors and sub-kPa pressure sensors

Autor: Eric S. Wallace, Cristina Tuinea-Bobe, Raechelle A. D’Sa, Claudine Gehin, Patrick Lemoine, M U Manzoor, Mark Tweedie
Přispěvatelé: GEHIN, Claudine, Department of physics and astronomy [Winnipeg], University of Manitoba [Winnipeg], INL - Capteurs Biomédicaux (INL - Capteurs), Institut des Nanotechnologies de Lyon (INL), Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-École Centrale de Lyon (ECL), Université de Lyon-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE)-Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE), École Centrale de Lyon (ECL), Université de Lyon-Université de Lyon-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)-École Centrale de Lyon (ECL), Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)
Rok vydání: 2011
Předmět:
Materials science
[SPI] Engineering Sciences [physics]
Scanning electron microscope
[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
Nanotechnology
02 engineering and technology
01 natural sciences
Contact angle
[SPI]Engineering Sciences [physics]
chemistry.chemical_compound
X-ray photoelectron spectroscopy
0103 physical sciences
Ultimate tensile strength
Electrical measurements
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
Electrical and Electronic Engineering
Composite material
ComputingMilieux_MISCELLANEOUS
Strain gauge
010302 applied physics
Polydimethylsiloxane
Mechanical Engineering
021001 nanoscience & nanotechnology
Pressure sensor
Electronic
Optical and Magnetic Materials
chemistry
Mechanics of Materials
0210 nano-technology
Zdroj: Journal of Micromechanics and Microengineering
Journal of Micromechanics and Microengineering, IOP Publishing, 2011, 21 (11), pp.115010
ISSN: 1361-6439
0960-1317
DOI: 10.1088/0960-1317/21/11/115010
Popis: This paper presents a novel method to prepare stretchable conductors and pressure sensors based on the gold/polydimethylsiloxane (PDMS) system. The gold films were sputtered onto structured PDMS surfaces produced with a photolithographic surface treatment with the aim of reducing tensile strains in the gold film. Scanning electron microscopy (SEM) and atomic force microscopy analyses showed that these 3D patterns reduce cracks and delaminations in the gold film. Electrical measurements indicate that the patterns also protect the films against repeated tensile cycling, although the un-patterned samples remained conducting as well after the completion of 120 cycles. The extrapolated resistivity value of the patterned sample (4.5 × 10 −5 � cm) compares well with previously published data. SEM micrographs indicate that the pattern features deflect the cracks and therefore toughen the gold film. However, x-ray photoelectron spectroscopy and contact angle analyses indicate that the patterning process also slightly modifies the surface chemistry. This patterning method was used to prepare capacitive strain gauges with pressure sensitivity (� Z/Z)/P of 0.14 kPa −1 in the sub-kPa regime. Such stretchable and potentially conformal low-pressure sensors have not been produced before and could prove advantageous for many smart fabric applications. (Some figures in this article are in colour only in the electronic version)
Databáze: OpenAIRE
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